VLLVan Leeuwenhoek Laboratorium

Contact details:

J.L. Joppe
Stieltjesweg 1, 2628 CK, Delft
+31 88 86 62401

The Van Leeuwenhoek Laboratory (VLL) is one of the largest (cleanroom) nanotechnology research facilities in the Netherlands. It is unique in being the only laboratory where a national research organization (TNO) and a leading technology university (TU Delft) join forces to create the extraordinary. The TNO part of the infrastructure is utilized for supporting international semiconductor industries like ASML and for fabricating and testing space born instruments like optical spectrometers. This involves research in material properties, vacuum technology, microscopy, contamination control, optics design and fabrication and system calibration. A part of the infrastructure is formally part of the national NanoLab infrastructure. We jointly (with TUD) pursue a quantum computer in QuTech. For the available equipment, see (2b). TNO is a R&D project organization. In the VLL, we normally perform projects for customers, based on system development, experiments or nano fabrication combined with scientific analysis. The equipment is also available for experiments only, although a skilled TNO operator is required. This is on a cost per hour bases.

1 Research
Nanotechnology is the research field where previously separate disciplines of physics, chemistry,
surface science, optics and electronics merge into fascinating new combinations. This results in
unprecedented prospects for instruments, materials and devices in areas as diverse as the
semiconductor equipment manufacturers, space instrument manufacturers, medical sector,
aerospace, automotive and processing industries.
Over 300 researchers, PhD students, postdocs and students currently use the VLL facilities. In
collaboration with its partners in the national Dutch nanotechnology initiative, the VLL focuses its
research in seven fields:
•Semiconductor Equipment development (EUV related)
•Space born sensors
•Nanofabrication of devices for Quantum Computation
•Free form optics
•Microscopy and metrology
2 Technology
The VLL provides technological infrastructure for supporting the semiconductor industries in the
development of new fabrication equipment as well as the design, fabrication and testing of space
born sensors. Jointly with the TUD, we use the VLL for the fabrication and inspection of functional
nanostructures (QuTech).
3 Technical specifications
•6000 m2 lab space and offices
•3000 m2 modular cleanroom areas (ISO-class 5 or better)
•Compliant with the latest cleanroom standards
•Vibration-free segments and segments with EM shielding available
4 State-of-the-art equipment
•EUV exposure
•Reticle handling, nm particle analysis
•Lithography (electron and ion beam, optical)
•Wet chemical processing
•Thin-film deposition
•Inspection (such as SEM, HIM, SPM techniques, optical microscopy)
•High-precision optics manufacturing and qualification (e.g. diamond turning, Nanomefos)
•Thermal Vacuum facility (VCF) for calibration of Space Instruments
•Absolute Radiometric Calibration Facility
•Assembly and integration equipment
5 A national nanotechnology facility
Through the VLL, TNO and TU Delft participate in the national consortium NanoLab NL which,
together with its partners, aims at providing a coherent and accessible infrastructure for
nanotechnological research and innovation in the Netherlands and beyond.
New users in the VLL are trained in basic safety and technology procedures before being granted
access to the facility.

Connection to strategic developments
High Tech Systemen en Materialen
Physical Sciences and Engineering